Design and characterization of in-plane MEMS yaw rate sensor
نویسندگان
چکیده
منابع مشابه
New Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملDesign of Novel High Sensitive MEMS Capacitive Fingerprint Sensor
In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the f...
متن کاملMEMS Capacitive Relative Humidity Sensor Design, Fabrication, and Characterization
The motivating principle behind this research is the development of a small, wearable sensor that would use humidity and temperature measurements as metrics for health monitoring. We have successfully fabricated macro-scale devices via pressing of a polymer between two aluminum plates, and the responses of these capacitors were tested in various humidity conditions. The transition from macro to...
متن کامل: the effect of sericin levels (silk glue protein) on rate of in vitro maturation, fertilization and culture of sheep oocytes
هدف از آزمایش اول بررسی اثر سطوح مختلف سریسین [0 (control), 0.1, 0.5, 1.0, 2.5 %] افزوده شده به محیط , ivm بر cumulus cell expansion، بلوغ هسته و توسعه متوالی جنین، در گوسفندان نژاد سنجابی در فصل تولید مثلی می باشد. از سرگیری میوز به وسیله خارج شدن اولین پولار بادی اندازه گیری و هم چنین درصد رسیدن جنین های دو سلولی به مرحله کلیواژ و بلاستوسیت نیز به عنوان نشانه ای از میزان شایستگی توسعه اولیه ج...
Micromechanical Thermo-fluidic Single-axis Yaw Rate Sensor
This paper reports on the design and analysis of a novel thermal single-axis microelectromechanical gyroscope. The gyroscope consists of a heated, pressure driven liquid flowing in a microchannel and two temperature sensors that detect the temperature difference between the two opposite walls of the channel. When an external rotation is applied, the resulting Coriolis acceleration acting on the...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sadhana
سال: 2009
ISSN: 0256-2499,0973-7677
DOI: 10.1007/s12046-009-0027-8